A State-of-the-art Review on Micro Electro-discharge Machining
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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Recent trend in reducing the size of products has given Micro Electrical Discharge Machining (MEDM) a significant amount of research attention. Due to the high precision, low tolerance and good surface quality that it can deliver, MEDM is potentially an important process for fabrication of micro-tools, micro-components and parts with micro-features. This paper briefs and highlights the various ...
متن کاملIn Situ Micro Gripper Shaping by Electro Discharge Machining
Bio technologies, electronic components, MEMS or watch industry require handling and positioning of ever smaller micro-parts (ten to hundred μm size). Several tools used for such tasks, called micro-grippers have been developed based on different catching and releasing principles. Vacuum grippers are mainly used in the macro world and have been successfully downsized to fulfill micro-world appl...
متن کاملA Model of Micro Electro-Discharge Machining Plasma Discharge in Deionized Water
For successful commercial adaptation of the l-EDM (micro electro-discharge machining) process, there is a need to increase the process efficiency by understanding the process mechanism. This paper presents a model of the plasma discharge phase of a single discharge l-EDM event in deionized water. The plasma discharge is modeled using global model approach in which the plasma is assumed to be sp...
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ژورنال
عنوان ژورنال: Procedia Technology
سال: 2016
ISSN: 2212-0173
DOI: 10.1016/j.protcy.2016.08.222